测量速度 X轴轮廓形状(mm/s) | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 | 0.02,0.05,0.1,0.2,0.5,1.0,2.0,5.0,10,20,30 |
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分辨率 Z1 轴标准 (µm) | 0.08/5mm, 0.008/0.5mm, 0.0008/0.05mm | 0.08/5mm, 0.008/0.5mm, 0.0008/0.05mm | 0.08/5mm, 0.008/0.5mm, 0.0008/0.05mm | 0.08/5mm, 0.008/0.5mm, 0.0008/0.05mm | 0.08/5mm, 0.008/0.5mm, 0.0008/0.05mm | 0.08/5mm, 0.008/0.5mm, 0.0008/0.05mm | 0.08/5mm, 0.008/0.5mm, 0.0008/0.05mm | 0.08/5mm, 0.008/0.5mm, 0.0008/0.05mm |
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示值精度 X轴轮廓形状 | ±(0.8+0.01L) μm L=驱动长度(mm) 宽范围:1.8 μm / 100 mm 窄范围:1.05 μm / 25 mm | ±(0.8+0.01L) μm L=驱动长度(mm) 宽范围:1.8 μm / 100 mm 窄范围:1.05 μm / 25 mm | ±(0.8+0.01L) μm L=驱动长度(mm) 宽范围:1.8 μm / 100 mm 窄范围:1.05 μm / 25 mm | ±(0.8+0.01L) μm L=驱动长度(mm) 宽范围:1.8 μm / 100 mm 窄范围:1.05 μm / 25 mm | ±(0.8+0.015L)μm L=驱动长度(mm),宽范围:3.8μm/200mm,窄范围:1.2μm/25mm | ±(0.8+0.015L)μm L=驱动长度(mm),宽范围:3.8μm/200mm,窄范围:1.2μm/25mm | ±(0.8+0.015L)μm L=驱动长度(mm),宽范围:3.8μm/200mm,窄范围:1.2μm/25mm | ±(0.8+0.015L)μm L=驱动长度(mm),宽范围:3.8μm/200mm,窄范围:1.2μm/25mm |
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电源 | 100-120V, 200-240V ±10%, AC50/60Hz | 100-120V, 200-240V ±10%, AC50/60Hz | 100-120V, 200-240V ±10%, AC50/60Hz | 100-120V, 200-240V ±10%, AC50/60Hz | 100-120V, 200-240V ±10%, AC50/60Hz | 100-120V, 200-240V ±10%, AC50/60Hz | 100-120V, 200-240V ±10%, AC50/60Hz | 100-120V, 200-240V ±10%, AC50/60Hz |
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